MEMS fiber optic grating
The MEMS Grating Modulator is a reflective diffraction grating with controllable groove depth. MEMS scan-ning gratings are constructed with a variety of MEMS actuators to drive a grating platform to scan across the target, and they play a significant role in various scanning systems. To our knowledge, this is the first direct comparison of piezoresistive and FBG transducers as force sensors.
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